• Passer à la navigation principale
  • Passer au contenu principal
  • Passer à la barre latérale principale
  • Passer au pied de page

ELENA

Un site utilisant Réseau de sites JRP - LNE

  • Home
  • The project
  • Workpackages
  • Project events
  • Tools / publications
  • Member Space

ELENA

Electrical nanoscale metrology in industry

Consumer electronics, innovative quantum technologies, and Internet of Things (IoT) applications all rely on semiconductors where reliable characterisation of electrical properties at the nanoscale is essential for European innovation and competitiveness. The measurement of these properties allows the evaluation of critical parameters (e.g. dielectric constant) used to define the performance of electronic materials and components. Currently, Conductive Atomic Force Microscopes (C‑AFM) and Scanning Microwave Microscopes (SMM) enable nanoscale electrical characterisation but they are costly, complicated and, in many cases where they are used, unreliable as measurements are not traceable.

This project aims to make such measurements traceable for the first time, with stated uncertainties, and affordable by developing and testing cost effective instrumentation and the first “out of lab” reference standards from DC (mHz) to GHz. Robust calibration methods and good practice guides using simplified uncertainty budgets will underpin this effort.

The project

Micro- and nano-electronics are considered by the European Commission (EC) a Key Enabling Technology (KET) with high potential for innovation throughout the economy, currently accounting for 10 % of EU Gross domestic product (GDP), and fostering highly skilled employment.

>> View the project

Workpackages

This project will develop and characterise cost effective instrumentation and easy to use reference standards, establish protocols and good practice guides, easily accessible 3D models and simplified uncertainty budgets for the conductive Atomic Force Microscopy (C-AFM) and Scanning Microwave Microscopy (SMM).

>> View workpackages

National Metrology Institutes

  Czech Metrology Institute  LNEMetasPTBTubitak UMEVSL

Industrial partners

Universities/research institutes

 Université de Lille

 

Stakeholders

                

                 

Barre latérale principale

LOGO EMPIR / EURAMET

News

9 Months Meeting

18 mai 2022

9 Months Meeting held at METAS – Bern, Switzerland Mon. 23rd – Tue. 24th of May 2022

Kick Off Meeting

17 septembre 2021

Kick off meeting (on line) 28 and 29 September 2021

Footer

  • LNE presentation
  • Legal Information
  • © 2016 – Webmaster
  • Advent
  • EDC-WFD
  • Emirim
  • Hydrogen
  • MetAMMI
  • MeTRA
  • Linkedin
  • YouTube
  • LNE Website
  • Contact Us
  • Specialized websites:
    • Food contact
    • GMED
    • French metrology
  • Around the world:
    • LNE Asia