WP1: Instrumentation for electrical nano-metrology in the frequency range DC to GHz
WP Leader: METAS
Other participants: BAM, CNRS, JKU, LNE, PTB, TUBITAK, ULILLE, UofG
Objective: The aim is to develop instrumentation for electrical nano-metrology in the frequency range DC (mHz) to GHz. In industrial contexts, the ease of use any instrumentation, robustness and correctness of measurement results, cost effectiveness of the process and spatial and electrical resolution of the eSPM are key aspects.
- Task 1.1: Design, fabrication, and testing of DC to GHz reference standards
- Task 1.2: Exploring probe design influence on probe-sample cross-talk
- Task 1.3: Testing the cost-effectiveness of simpler measurement microwave electronics
- Task 1.4: Comparison of broadband impedance matching procedures
WP2: Calibration methods for two electrical Scanning Probe Microscope (eSPM) techniques: C AFM and SMM
WP Leader: LNE
Other participants: BAM, CEA, CNRS, DFM, JKU, METAS, PTB, TUBITAK, ULILLE, UofG
Objective: The aim is to quantify all the uncertainty contributions which impact the calibration of the C AFM and SMM. The quantification of all the uncertainty contributions will allow one to develop robust C AFM and SMM calibration techniques for making measurements of DC current from fA to µA, DC resistance from 100 W to 100 TW, and HF admittance from 100 nS to 100 mS traceable to the SI.
- Task 2.1: Quantification of uncertainty contributions from the reference standards
- Task 2.2: Investigation of uncertainty contributions from environmental conditions
- Task 2.3: Investigation of uncertainty contributions from non-environmental operating parameters
- Task 2.4: Quantification of uncertainty contributions from the measurement instrument
- Task 2.5: Development of C AFM calibration techniques
- Task 2.6: Development of SMM calibration techniques
WP3: 3D multi-physics modelling, based on analytical or numerical approaches
WP Leader: CNRS
Other participants: BAM, CEA, CMI, DFM, JKU, LNE, METAS, ULILLE, UofG
Objective: The aim is to develop reliable 3D multi-physics modelling based on analytical or numerical approaches in order to evaluate the effects of the water meniscus at the tip-sample interface, as well as electromagnetic interactions between tip and sample, tip geometries, and tip/sample materials on the electrical measurement. For contact-based electrical SPM techniques this also includes aspects of tip-sample deformation, electrical contact formation, and various electro-mechanical regimes data interpretation.
- Task 3.1: Developing tools to estimate water meniscus influence on tip-sample interface
- Task 3.2: Evaluating tip shape influence in contact low frequency and DC measurements
- Task 3.3: Evaluating tip-sample electromagnetic interactions in high-frequency measurements
- Task 3.4: Validation of numerical models with experimental datasets
WP4: Simplified uncertainty budgets for industrial use
WP Leader: BAM
Other participants: CNRS, DFM, JKU, LNE, METAS, PTB, TUBITAK, ULILLE
Objective: The aim is to establish uncertainty budgets using inputs from WP1, WP2 and WP3, and to develop calibration methods for the key electrical measurands. This will cover the DC range from fA to µA, DC resistance from 100 Ω to 100 TΩ and HF admittance from 100 nS to 100 mS.
Case studies involving C AFM and SMM and reference standards developed in WP1 will be conducted with external industry and academia. Two good practice guides will be produced for DC current, DC resistance at nanoscale using C AFM as well as HF admittance measurement using SMM.
- Task 4.1: Establishing a simplified uncertainty budget for C AFM
- Task 4.2: Establishing a simplified uncertainty budget for SMM
- Task 4.3: Validation of reference standards for C AFM
- Task 4.4: Validation of reference standards for SMM
WP5: Creating Impact
WP Leader: ISC
Other participants: BAM, CEA, CMI, CNRS, DFM, JKU, LNE, METAS, PTB, TUBITAK, ULILLE, UofG
Objective: The aim is to maximise the impact of this project within the European community of stakeholders and industrial end-users, including those within other EURAMET countries outside EMPIR. This will ensure that this project achieves the highest possible impact on the European region.
- Task 5.1: Knowledge transfer
- Task 5.2: Training
- Task 5.3: Uptake and exploitation